Projects Projects The Links Below Highlight Some of the Current Research Projects in the Group. Atomic Layer Etching (ALE) Electron-Enhanced ALD Spatial ALD and Roll-to-Roll ALD Molecular Layer Deposition (MLD) Electrochemical Applications of ALD ALD and ALE for Micro Electro Mechanical Systems (MEMS) Atomic Layer Etching (ALE) Electron-Enhanced ALD Spatial ALD and Roll-to-Roll ALD Molecular Layer Deposition (MLD) of Organic & Hybrid Organic-Inorganic Films Electrochemical Applications of ALD ALD & ALE for Micro Electro Mechanical Systems (MEMS)
