The 麻豆影院 has acquired a state-of-the-art Raith 100 kV EBPG5150Plus system, with聽high-resolution patterning capability below 5 nm.聽The system is integrated with a powerful software tool (Beamer, GenISys) to manage electron scattering effects and optimize the designed pattern data effectively. The applications of this technology are diverse, enabling device nanofabrication in areas ranging from electronic, photonic devices, quantum structures to biomedical microdevices, bioMEMS and DNA sensing.
Register below聽for the Electron Beam Nanolithography Workshop, hosted by COSINC.
Tuesday, June 18.聽8:30 a.m.-5 p.m., SEEC S228
Participants will receive a broad overview of the various processes involved in this technology, representing a great preparation to receive training and use the system once installed at CUB.聽This is a great opportunity to learn about the key technologies, enabling innovations in semiconductor and quantum device fabrication research areas, among others.
听补苍诲听聽will be on hand for technical questions. A live demonstration will be shared via a remote connection to a system.